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Silicon Processing for the VLSI Era: Process Technology by Richard N. Tauber, Stanley Wolf

Silicon Processing for the VLSI Era: Process Technology Richard N. Tauber, Stanley Wolf ebook
ISBN: 0961672164, 9780961672164
Page: 960
Publisher: Lattice Press
Format: pdf

Tauber: Silicon Processing for the VLSI Era, Vol 1: Process technology, 2 nd ed. Silicon Processing for the VLSI Era: Deep-Submicron Process Technology. 4: Deep-Submicron Process Technology. Processing silicon_nitride silicon_oxide sputtering stress. €�Introduction to VLSI Systems”, Mead C. Product Description Silicon Processing for the VLSI Era, Vol. Silicon Processing for the VLSI Era, Vol. Handbook of VLSI Microlithography John N. €�Silicon Processing for the VLSI Era”, Volume 1 – Process Technology, 2nd, S. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely Silicon Processing for the VLSI Era, Vol. Helbert, 2 edition | English | 2002-01-14 | ISBN: 0815514441 | 1022 pages | PDF | 6.4 mbThis handbook gives readers a close look at the entire tech.